Low-cost MEMS fabrication technology using a replica molding technique
Wednesday, November 21, 2012 - 09:31
in Physics & Chemistry
Researchers at the National Institute of Advanced Industrial Science and Technology (AIST), have developed a microelectromechanical systems (MEMS) device fabrication technology that uses only printing and injection molding. This has been achieved by integrating the microfabrication technology and the MEMS design evaluation technology of AIST. A lighting device has been fabricated by combining the signal processing technology of Design Tech Co., Ltd. with the developed technology.