Innovative microactuators: Compact 3.5 mm cubic rotary-linear piezoelectric actuator
Friday, March 25, 2011 - 07:01
in Physics & Chemistry
(PhysOrg.com) -- Microactuators are critical components for industrial applications such as MEMS, micro-medical devices, and microrobotics. However, the fabrication of increasingly sophisticated, millimeter sized microactuators is complicated and proving to be a challenge.