Scientists Shed 'Light' on Semiconductor Quandry
Tuesday, July 14, 2009 - 15:07
in Physics & Chemistry
(PhysOrg.com) -- UC San Diego scientists are using laser plasma-produced light sources to explore performance improvements of critical inspection tools for the semiconductor industry, which ultimately will enable industry to pursue even better and faster chips. While optical lithography is being pushed to its limits in the semiconductor industry, there is a growing concern whether metrology tools can keep pace for creating and inspecting the new generation of devices.