Nanoscale Dimensioning Is Fast, Cheap with New Optical Technique

(PhysOrg.com) -- A novel technique under development at the National Institute of Standards and Technology uses a relatively inexpensive optical microscope to quickly and cheaply analyze nanoscale dimensions with nanoscale measurement sensitivity. Termed “Through-focus Scanning Optical Microscope” (TSOM) imaging, the technique has potential applications in nanomanufacturing, semiconductor process control and biotechnology.

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