Lower power consumption for electronics: Thin film packaged MEMS resonator with industry record Q factor and low bias voltage

An innovative SiGe (silicon germanium) thin film packaged SOI-based MEMS resonator featuring an industry-record Q factor combined with a low bias voltage has been developed. This groundbreaking resonator paves the way towards miniaturization and low power consumption of timing devices used in a variety of applications such as consumer electronics and automotive electronics.

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