Detecting effects of 3-D shapes in nanoscale chip features

Thursday, April 30, 2015 - 05:30 in Physics & Chemistry

As microchip feature dimensions approach atomic scale, it becomes formidably difficult to measure their size and shape. According to the International Technology Roadmap for Semiconductors, within the next couple of years the typical length of a transistor's "gate" – its on-off switch – will be less than 20 nanometers.

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