Scientists develop 3D SEM metrology for 10nm structures
Monday, March 24, 2014 - 09:31
in Physics & Chemistry
(Phys.org) —PML researchers have devised an idea for determining the three-dimensional shape of features as small as 10 nanometers wide. The model-based method compares data from scanning electron microscope (SEM) images with stored entries in a library of three dimensional (3D) shapes to find a match and to determine the shape of the sample. The work provides a powerful new way to characterize nanostructures.