Scanning electron microscopes: Getting rid of bad vibrations

Tuesday, March 18, 2014 - 12:31 in Physics & Chemistry

Scanning electron microscopes are extremely sensitive and even subtle movements going on around them can affect their accuracy. Vibration control tables already exist to dampen these sometimes barely perceptible disturbances. But now a new kind of isolation platform for the first time integrates sensors and actuators into the mount – resulting in a platform that is more cost-effective and compact than its predecessors.

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