Measuring nanoscale features with fractions of light
Thursday, December 3, 2015 - 20:42
in Physics & Chemistry
Researchers are seeing the light, but in an altogether different way. And how they are doing it just might be the semiconductor industry's ticket for extending its use of optical microscopes to measure computer chip features that are approaching 10 nanometers, tiny fractions of the wavelength of light. They report measurements of lines as thin as 16 nanometers wide on a SEMATECH-fabricated wafer were accurate to one nanometer.