Measuring nanoscale features with fractions of light
Thursday, December 3, 2015 - 16:44
in Physics & Chemistry
National Institute of Standards and Technology (NIST) researchers are seeing the light, but in an altogether different way. And how they are doing it just might be the semiconductor industry's ticket for extending its use of optical microscopes to measure computer chip features that are approaching 10 nanometers, tiny fractions of the wavelength of light.