Imec's SiGe MEMS technology platform improves performance of state-of-the-art MEMS
Wednesday, July 14, 2010 - 14:07
in Physics & Chemistry
Imec researchers demonstrated the value of its SiGe above-IC MEMS technology platform for improving performance of state-of-the-art MEMS with the development of new MEMS devices. The new devices are a 15µm SiGe micromirror and a grating light valve for high-resolution displays. The devices were realized with Imec's generic CMOS-compatible MEMS process for the monolithic integration of MEMS devices directly on top of CMOS metallization.