Optical microscope technique confirmed as valid nano-measurement tool
Wednesday, August 27, 2014 - 05:30
in Physics & Chemistry
(Phys.org) —Recent experiments have confirmed that a technique developed several years ago at the National Institute of Standards and Technology (NIST) can enable optical microscopes to measure the three-dimensional (3-D) shape of objects at nanometer-scale resolution—far below the normal resolution limit for optical microscopy (about 250 nanometers for green light). The results could make the technique a useful quality control tool in the manufacture of nanoscale devices such as next-generation microchips.